Error compensation for three-dimensional profile measurement system

Xu Ye; Haobo Cheng; Zhichao Dong; Hon Yuen Tam

doi:10.1007/s12200-015-0497-8

Error compensation for three-dimensional profile measurement system

Xu Ye
, Haobo Cheng^*
, Zhichao Dong
, Hon Yuen Tam

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2λ.

Original language	English
Pages (from-to)	402-412
Number of pages	11
Journal	Frontiers of Optoelectronics
Volume	8
Issue number	4
DOIs	https://doi.org/10.1007/s12200-015-0497-8
Publication status	Published - 1 Dec 2015
Externally published	Yes

Keywords

alignment error
aspheric surface
error compensation
three-dimensional (3D) profile measurement

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10.1007/s12200-015-0497-8

Cite this

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title = "Error compensation for three-dimensional profile measurement system",

abstract = "Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2λ.",

keywords = "alignment error, aspheric surface, error compensation, three-dimensional (3D) profile measurement",

author = "Xu Ye and Haobo Cheng and Zhichao Dong and Tam, \{Hon Yuen\}",

note = "Publisher Copyright: {\textcopyright} 2015, Higher Education Press and Springer-Verlag Berlin Heidelberg.",

year = "2015",

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day = "1",

doi = "10.1007/s12200-015-0497-8",

language = "English",

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journal = "Frontiers of Optoelectronics",

issn = "2095-2759",

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}

TY - JOUR

T1 - Error compensation for three-dimensional profile measurement system

AU - Ye, Xu

AU - Cheng, Haobo

AU - Dong, Zhichao

AU - Tam, Hon Yuen

PY - 2015/12/1

Y1 - 2015/12/1

N2 - Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2λ.

AB - Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2λ.

KW - alignment error

KW - aspheric surface

KW - error compensation

KW - three-dimensional (3D) profile measurement

UR - https://www.scopus.com/pages/publications/84949223137

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DO - 10.1007/s12200-015-0497-8

M3 - Article

AN - SCOPUS:84949223137

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VL - 8

SP - 402

EP - 412

JO - Frontiers of Optoelectronics

JF - Frontiers of Optoelectronics

IS - 4

ER -

Error compensation for three-dimensional profile measurement system

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Keywords

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