Enhancing the resolution of two-photon microfabrication

Xiao Quan Wei*, Yan Qiu Li, Guo Hua Gao, Yu Zhu, Jing Ma

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Upgrading the system resolution power is one of the most importance things in two-photon micro-fabrication research. According to the theory on two-photon micro-fabrication, we are able to reveal the relation between the and resolution of fabrication system. Then, the method to enhance the resolution of two-photon fabrication by optimizing the techniques characters is discussed, accompanied with the experimental support. Next, the proposal that using the diffractive optical element to modulate the wave front distribution and improve the resolution is proposed, which is designed in theory and verified in experience.

Original languageEnglish
Pages (from-to)9-11+15
JournalWeixi Jiagong Jishu/Microfabrication Technology
Issue number5
Publication statusPublished - Oct 2008

Keywords

  • Micro-fabrication
  • Resolution enhancement
  • Two-photon

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