Enhancing the Electrical Performance of ITZO Thin-Film Transistors with IZO Modified Layer

Research output: Contribution to journalConference articlepeer-review

Abstract

As a new metal oxide active layer semiconductor material, ITZO has received more and more attention and research applications. In order to improve the electrical properties of ITZO thin film transistor, a thin indium IZO film is used as the modified layer to design a double active layer thin film transistor. By adjusting the fabrication process of the IZO layer, a high-performance device with a mobility of 40.1 cm2 (V·s) and a threshold voltage of only −1.34 V was obtained, with a positive bias threshold voltage shift of only 1.07 V.

Original languageEnglish
Pages (from-to)768-771
Number of pages4
JournalDigest of Technical Papers - SID International Symposium
Volume56
Issue numberS1
DOIs
Publication statusPublished - 2025
Externally publishedYes
EventInternational Conference on Display Technology, ICDT 2025 - Xiamen, China
Duration: 18 Mar 202521 Mar 2025

Keywords

  • dual active layer
  • electrical characteristics
  • metal oxide semiconductors
  • thin-film transistors

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