Enhanced deep ultraviolet inverse polarization transmission through hybrid Al-SiO2 gratings

G. Kang; J. Rahomäki; J. Dong; S. Honkanen; J. Turunen

doi:10.1063/1.4823537

Enhanced deep ultraviolet inverse polarization transmission through hybrid Al-SiO₂ gratings

G. Kang^*
, J. Rahomäki
, J. Dong
, S. Honkanen
, J. Turunen

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

We report on the enhancement of inverse polarization transmission of deep ultraviolet light, with the TE transmittance η_TE largely exceeding the TM transmittance η_TM, through a hybrid Al-SiO ₂ grating: The grating slits are conformally filled with SiO ₂. Strong coupling of the incident wave to surface plasmon polaritons greatly reduces the TM transmittance, whereas the coupling to the low-loss TE mode, with its effective refractive index approaching that of the substrate, leads to the enhanced TE transmittance. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment, much higher than any previously reported values.

Original language	English
Article number	131110
Journal	Applied Physics Letters
Volume	103
Issue number	13
DOIs	https://doi.org/10.1063/1.4823537
Publication status	Published - 23 Sept 2013
Externally published	Yes

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abstract = "We report on the enhancement of inverse polarization transmission of deep ultraviolet light, with the TE transmittance ηTE largely exceeding the TM transmittance ηTM, through a hybrid Al-SiO 2 grating: The grating slits are conformally filled with SiO 2. Strong coupling of the incident wave to surface plasmon polaritons greatly reduces the TM transmittance, whereas the coupling to the low-loss TE mode, with its effective refractive index approaching that of the substrate, leads to the enhanced TE transmittance. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment, much higher than any previously reported values.",

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AU - Kang, G.

AU - Rahomäki, J.

AU - Dong, J.

AU - Honkanen, S.

AU - Turunen, J.

PY - 2013/9/23

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N2 - We report on the enhancement of inverse polarization transmission of deep ultraviolet light, with the TE transmittance ηTE largely exceeding the TM transmittance ηTM, through a hybrid Al-SiO 2 grating: The grating slits are conformally filled with SiO 2. Strong coupling of the incident wave to surface plasmon polaritons greatly reduces the TM transmittance, whereas the coupling to the low-loss TE mode, with its effective refractive index approaching that of the substrate, leads to the enhanced TE transmittance. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment, much higher than any previously reported values.

AB - We report on the enhancement of inverse polarization transmission of deep ultraviolet light, with the TE transmittance ηTE largely exceeding the TM transmittance ηTM, through a hybrid Al-SiO 2 grating: The grating slits are conformally filled with SiO 2. Strong coupling of the incident wave to surface plasmon polaritons greatly reduces the TM transmittance, whereas the coupling to the low-loss TE mode, with its effective refractive index approaching that of the substrate, leads to the enhanced TE transmittance. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment, much higher than any previously reported values.

UR - https://www.scopus.com/pages/publications/84885008872

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DO - 10.1063/1.4823537

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JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Enhanced deep ultraviolet inverse polarization transmission through hybrid Al-SiO₂ gratings

Abstract

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