Electrostatic analysis of MEMS comb-drive structure

Ming Hui Li; Shi Qiao Gao; Xiu Cui Wang

Electrostatic analysis of MEMS comb-drive structure

Ming Hui Li^*
, Shi Qiao Gao
, Xiu Cui Wang

^*Corresponding author for this work

School of Mechatronical Engineering

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

Based on the theory of parallel plate electrostatic field with edge effect, the formulas of the capacitance and the electrostatic force of comb-drive structure are derived, and the electrostatic characteristic of the structure is analyzed, which are compared to the results of a finite element method simulation. When the moving fingers are closed to the fixed fingers, pull-in effect occurs, therefore moving range is analyzed in quantity, and the maximum applied voltage is discussed, to provide a theoretical basis for structural design.

Original language	English
Pages (from-to)	1-3
Number of pages	3
Journal	Dongbei Daxue Xuebao/Journal of Northeastern University
Volume	29
Issue number	SUPPL.
Publication status	Published - Jun 2008

Keywords

Comb-drive
Edge effect
Electrostatic forces
MEMS

Cite this

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title = "Electrostatic analysis of MEMS comb-drive structure",

abstract = "Based on the theory of parallel plate electrostatic field with edge effect, the formulas of the capacitance and the electrostatic force of comb-drive structure are derived, and the electrostatic characteristic of the structure is analyzed, which are compared to the results of a finite element method simulation. When the moving fingers are closed to the fixed fingers, pull-in effect occurs, therefore moving range is analyzed in quantity, and the maximum applied voltage is discussed, to provide a theoretical basis for structural design.",

keywords = "Comb-drive, Edge effect, Electrostatic forces, MEMS",

author = "Li, \{Ming Hui\} and Gao, \{Shi Qiao\} and Wang, \{Xiu Cui\}",

year = "2008",

month = jun,

language = "English",

volume = "29",

pages = "1--3",

journal = "Dongbei Daxue Xuebao/Journal of Northeastern University",

issn = "1005-3026",

publisher = "Northeast University",

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TY - JOUR

T1 - Electrostatic analysis of MEMS comb-drive structure

AU - Li, Ming Hui

AU - Gao, Shi Qiao

AU - Wang, Xiu Cui

PY - 2008/6

Y1 - 2008/6

N2 - Based on the theory of parallel plate electrostatic field with edge effect, the formulas of the capacitance and the electrostatic force of comb-drive structure are derived, and the electrostatic characteristic of the structure is analyzed, which are compared to the results of a finite element method simulation. When the moving fingers are closed to the fixed fingers, pull-in effect occurs, therefore moving range is analyzed in quantity, and the maximum applied voltage is discussed, to provide a theoretical basis for structural design.

AB - Based on the theory of parallel plate electrostatic field with edge effect, the formulas of the capacitance and the electrostatic force of comb-drive structure are derived, and the electrostatic characteristic of the structure is analyzed, which are compared to the results of a finite element method simulation. When the moving fingers are closed to the fixed fingers, pull-in effect occurs, therefore moving range is analyzed in quantity, and the maximum applied voltage is discussed, to provide a theoretical basis for structural design.

KW - Comb-drive

KW - Edge effect

KW - Electrostatic forces

KW - MEMS

UR - https://www.scopus.com/pages/publications/48549096906

M3 - Article

AN - SCOPUS:48549096906

SN - 1005-3026

VL - 29

SP - 1

EP - 3

JO - Dongbei Daxue Xuebao/Journal of Northeastern University

JF - Dongbei Daxue Xuebao/Journal of Northeastern University

IS - SUPPL.

ER -

Electrostatic analysis of MEMS comb-drive structure

Abstract

Keywords

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