TY - JOUR
T1 - Electromagnetic characteristics of high pressure microwave plasma generator based on a cylindrical resonant cavity
AU - Liu, Yongxi
AU - Zhang, Guixin
AU - Hou, Lingyun
AU - Wang, Qiang
PY - 2013/7
Y1 - 2013/7
N2 - To investigate the electromagnetic properties of microwave plasma generator intuitively, quantitatively, and conveniently, we presented a novel high pressure microwave plasma generator based on a cylindrical resonant cavity, and simulated and analyzed the cavity of specified dimension and its coupling devices using the software HFSS. For the microwave resonator under TM010 mode, characteristic parameters, such as quality factor, resonant frequency, reflection loss, port impedance, and maximum electric field strength, were calculated. Meanwhile, the impedance matching and the electric field distribution were studied. In addition, a practical generator was tested under 5 atm, and simulation results of electric field intensity were compared with the experimental results. The experimental results imply that the proposed microwave plasma generator is feasible: under high pressure, it can excite microwave plasma with a microwave peak power lower than 1 kW within a certain range of frequency.
AB - To investigate the electromagnetic properties of microwave plasma generator intuitively, quantitatively, and conveniently, we presented a novel high pressure microwave plasma generator based on a cylindrical resonant cavity, and simulated and analyzed the cavity of specified dimension and its coupling devices using the software HFSS. For the microwave resonator under TM010 mode, characteristic parameters, such as quality factor, resonant frequency, reflection loss, port impedance, and maximum electric field strength, were calculated. Meanwhile, the impedance matching and the electric field distribution were studied. In addition, a practical generator was tested under 5 atm, and simulation results of electric field intensity were compared with the experimental results. The experimental results imply that the proposed microwave plasma generator is feasible: under high pressure, it can excite microwave plasma with a microwave peak power lower than 1 kW within a certain range of frequency.
KW - Coupling probe
KW - Electric field strength
KW - High pressure
KW - Microwave plasma
KW - Resonator
KW - Simulation
UR - http://www.scopus.com/inward/record.url?scp=84881656861&partnerID=8YFLogxK
U2 - 10.3969/j.issn.1003-6520.2013.07.033
DO - 10.3969/j.issn.1003-6520.2013.07.033
M3 - Article
AN - SCOPUS:84881656861
SN - 1003-6520
VL - 39
SP - 1757
EP - 1762
JO - Gaodianya Jishu/High Voltage Engineering
JF - Gaodianya Jishu/High Voltage Engineering
IS - 7
ER -