Electrically reconfigurable miniaturized spectrometers based on nano-kirigami metasurfaces

Computational spectrometers offer miniaturization potential but face the spatial uniformity requirement of incident light and trade-offs between footprint and performance. Here we report a nano-kirigami spectrometer achieving ∼5 nm resolution within a 2.5 μm × 2.5 μm footprint. The device uses voltage-controlled deformation of Au-SiO₂-Si trilayer structures with Archimedean spiral patterns, enabling dynamic spectral encoding through 2D-to-3D morphological transitions. Combined with neural network reconstruction, the spectrometer operates across the visible light band with large correlation coefficients and a high signal-to-noise ratio. Based on this reconfigurable spectrometer, we further demonstrate the preliminary applications such as classification, regression, and spectral imaging. This work, as a proof-of-concept demonstration, establishes nano-kirigami as a platform for ultracompact on-chip spectroscopy.