Electrical insulation and bending properties of SiOx barrier layers prepared on flexible stainless steel foils by different preparing methods

Yu Qiong Li; Zhi Nong Yu; Jian Leng; Dong Pu Zhang; She Chen; Gang Jin

doi:10.1016/j.tsf.2011.02.075

Electrical insulation and bending properties of SiO_x barrier layers prepared on flexible stainless steel foils by different preparing methods

Yu Qiong Li, Zhi Nong Yu, Jian Leng, Dong Pu Zhang, She Chen, Gang Jin^*

^*Corresponding author for this work

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Stainless steel foils on which flexible display devices and integrated solar modules are prepared need to be coated by barrier layers for electrical insulation. In this study, SiO_x barrier layer was prepared on steel foils (SUS 304) by ion beam assisted deposition, Sol-gel deposition and plasma enhanced chemical vapor deposition, respectively. The electrical properties of the SiO_x films, such as resistance, reactance, leakage current density, breakdown field strength and performance index were investigated, and the bending properties were evaluated by bending tests. The best electrical insulation and bending properties of barrier could be achieved with 4 μm thick SiO_x layer prepared by plasma enhanced chemical vapor deposition.

Original language	English
Pages (from-to)	4234-4238
Number of pages	5
Journal	Thin Solid Films
Volume	519
Issue number	13
DOIs	https://doi.org/10.1016/j.tsf.2011.02.075
Publication status	Published - 29 Apr 2011

Keywords

Bending resistance
Dielectric barriers
Electrical insulation
Silicon oxide
Stainless steel foils

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10.1016/j.tsf.2011.02.075

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abstract = "Stainless steel foils on which flexible display devices and integrated solar modules are prepared need to be coated by barrier layers for electrical insulation. In this study, SiOx barrier layer was prepared on steel foils (SUS 304) by ion beam assisted deposition, Sol-gel deposition and plasma enhanced chemical vapor deposition, respectively. The electrical properties of the SiOx films, such as resistance, reactance, leakage current density, breakdown field strength and performance index were investigated, and the bending properties were evaluated by bending tests. The best electrical insulation and bending properties of barrier could be achieved with 4 μm thick SiOx layer prepared by plasma enhanced chemical vapor deposition.",

keywords = "Bending resistance, Dielectric barriers, Electrical insulation, Silicon oxide, Stainless steel foils",

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AU - Li, Yu Qiong

AU - Yu, Zhi Nong

AU - Leng, Jian

AU - Zhang, Dong Pu

AU - Chen, She

AU - Jin, Gang

PY - 2011/4/29

Y1 - 2011/4/29

N2 - Stainless steel foils on which flexible display devices and integrated solar modules are prepared need to be coated by barrier layers for electrical insulation. In this study, SiOx barrier layer was prepared on steel foils (SUS 304) by ion beam assisted deposition, Sol-gel deposition and plasma enhanced chemical vapor deposition, respectively. The electrical properties of the SiOx films, such as resistance, reactance, leakage current density, breakdown field strength and performance index were investigated, and the bending properties were evaluated by bending tests. The best electrical insulation and bending properties of barrier could be achieved with 4 μm thick SiOx layer prepared by plasma enhanced chemical vapor deposition.

AB - Stainless steel foils on which flexible display devices and integrated solar modules are prepared need to be coated by barrier layers for electrical insulation. In this study, SiOx barrier layer was prepared on steel foils (SUS 304) by ion beam assisted deposition, Sol-gel deposition and plasma enhanced chemical vapor deposition, respectively. The electrical properties of the SiOx films, such as resistance, reactance, leakage current density, breakdown field strength and performance index were investigated, and the bending properties were evaluated by bending tests. The best electrical insulation and bending properties of barrier could be achieved with 4 μm thick SiOx layer prepared by plasma enhanced chemical vapor deposition.

KW - Bending resistance

KW - Dielectric barriers

KW - Electrical insulation

KW - Silicon oxide

KW - Stainless steel foils

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Electrical insulation and bending properties of SiO_x barrier layers prepared on flexible stainless steel foils by different preparing methods

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Keywords

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