Electric Field Micro Mill in the Nonlinear Regime with Enhanced Noise Density and Sensitivity

Lifang Ran, Guijie Wang, Shenglin Hou, Qianzhen Su, Jianhua Li, Bo Zhang, Xiaolong Wen*, Najib Kacem, Ashwin A. Seshia*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper investigates experimentally the nonlinear dynamics of a micro electric field mill (MEFM) sensor. The bifurcation topology is fully characterized in the frequency domain, capturing both the hardening and softening effects induced by the mechanical and electrostatic nonlinearities, respectively. When driven beyond its critical amplitude, the sensor's sensitivity and resolutions improve respectively from 0.115 mV/(kV/m) and 70.14 V/m·√Hz for linear oscillations to 0.458 mV l(kV 1m) and 21.25 V/m·√Hz in the nonlinear regime. Additionally, the sensor maintains stable sensitivity despite frequency drifts by exploiting nonlinearity.

Original languageEnglish
Title of host publication2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350363517
DOIs
Publication statusPublished - 2024
Externally publishedYes
Event2024 IEEE Sensors, SENSORS 2024 - Kobe, Japan
Duration: 20 Oct 202423 Oct 2024

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference2024 IEEE Sensors, SENSORS 2024
Country/TerritoryJapan
CityKobe
Period20/10/2423/10/24

Keywords

  • bifurcation point
  • hardening effects
  • micro electric field mill
  • nonlinearity
  • softening effects

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