@inproceedings{93dbd158a6b943f19c97f813689269dc,
title = "Electric Field Micro Mill in the Nonlinear Regime with Enhanced Noise Density and Sensitivity",
abstract = "This paper investigates experimentally the nonlinear dynamics of a micro electric field mill (MEFM) sensor. The bifurcation topology is fully characterized in the frequency domain, capturing both the hardening and softening effects induced by the mechanical and electrostatic nonlinearities, respectively. When driven beyond its critical amplitude, the sensor's sensitivity and resolutions improve respectively from 0.115 mV/(kV/m) and 70.14 V/m·√Hz for linear oscillations to 0.458 mV l(kV 1m) and 21.25 V/m·√Hz in the nonlinear regime. Additionally, the sensor maintains stable sensitivity despite frequency drifts by exploiting nonlinearity.",
keywords = "bifurcation point, hardening effects, micro electric field mill, nonlinearity, softening effects",
author = "Lifang Ran and Guijie Wang and Shenglin Hou and Qianzhen Su and Jianhua Li and Bo Zhang and Xiaolong Wen and Najib Kacem and Seshia, {Ashwin A.}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE Sensors, SENSORS 2024 ; Conference date: 20-10-2024 Through 23-10-2024",
year = "2024",
doi = "10.1109/SENSORS60989.2024.10784459",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE Sensors, SENSORS 2024 - Conference Proceedings",
address = "United States",
}