Effect of the β phase on compressive mechanical property of CVD tungsten

The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF₆ reduction by H₂ adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440°C is much lower than that with only α phase deposited at 540°C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400°C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.