Abstract
Effect of ion bombardment energy on microstructure, surface roughness, elasticity, hardness and friction coefficient of the diamond-like carbon (DLC) films deposited by ion beam assisted deposition (IBAD) has been studied. The DLC films with good mechanical and tribological properties have been obtained. The relationship between microstructure and properties has also been discussed. It has been found and analyzed that there is difference between the value of knoop micro-hardness and nanohardness of the same series of DLC films.
| Original language | English |
|---|---|
| Pages (from-to) | 3-5+44 |
| Journal | Cailiao Gongcheng/Journal of Materials Engineering |
| Issue number | 2 |
| Publication status | Published - 2000 |
| Externally published | Yes |
Keywords
- Diamond-like carbon film
- Ion beam assisted deposition (ibad)
- Nanohardness