Dynamic test of vibration for micro machined gyroscope based on high speed photography

As the common dynamic test method for Micro-electro-mechanical System (MEMS) is limited by its tiny feature sizes, this paper proposes a dynamic test system for micro machined gyroscope based on high speed photography after introducing three kinds of dynamic test methods. The hardware of the system and the function of the software are introduced. Then, it explains the key algorithm of the dynamic test system. It uses the Otsu algorithm to segment the image, and takes the region of Interest (ROI) and moment invariants to obtain the vibration curve. After spectrum analysis, the vibration characteristic of the micro machined gyroscope can be gotten. Experimental results indicate that the precision of the amplitude is 0.1 μm and the repeatability and consistency of the frequency domain is satisfactory. The dynamic test method shows higher precision, rapid speed, as well as strong anti-jamming and stabilization. It reduces the amount of calculation and improves the operation speed for the system.