@inproceedings{7104838d4a964cda83e8358fd38f5ed7,
title = "Dynamic Accuracy Method of laser imaging system Based on MEMS mirror",
abstract = "As one of the important ways of laser imaging, Microelectromechanical system (MEMS)-based mirror imaging has the advantages of small volume and high frequency. In this paper, the relationship between key parameters of MEMS mirrors is studied. Also, the realization method of scanning imaging based on a one-dimensional MEMS mirror is studied. A method of controlling the number of scanning harnesses based on a MEMS mirror is proposed. The single-lens method is used to design and collimate the transmitting optical system with Zemax simulation software, and the effects of the different numbers of scanning wire harnesses are simulated. The result shows that the number of scanning wire harnesses can be controlled, indicating that the system's dynamic accuracy can be achieved.",
keywords = "Dynamic accuracy, Laser imaging, MEMS mirror, Number of wiring harnesses",
author = "Jun Zhang and Li Yang and Huimin Chen",
note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; 3rd International Conference on Machine Learning and Computer Application, ICMLCA 2022 ; Conference date: 16-12-2022 Through 18-12-2022",
year = "2023",
doi = "10.1117/12.2675130",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Shuhong Ba and Fan Zhou",
booktitle = "Third International Conference on Machine Learning and Computer Application, ICMLCA 2022",
address = "United States",
}