Dynamic Accuracy Method of laser imaging system Based on MEMS mirror

Jun Zhang, Li Yang*, Huimin Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

As one of the important ways of laser imaging, Microelectromechanical system (MEMS)-based mirror imaging has the advantages of small volume and high frequency. In this paper, the relationship between key parameters of MEMS mirrors is studied. Also, the realization method of scanning imaging based on a one-dimensional MEMS mirror is studied. A method of controlling the number of scanning harnesses based on a MEMS mirror is proposed. The single-lens method is used to design and collimate the transmitting optical system with Zemax simulation software, and the effects of the different numbers of scanning wire harnesses are simulated. The result shows that the number of scanning wire harnesses can be controlled, indicating that the system's dynamic accuracy can be achieved.

Original languageEnglish
Title of host publicationThird International Conference on Machine Learning and Computer Application, ICMLCA 2022
EditorsShuhong Ba, Fan Zhou
PublisherSPIE
ISBN (Electronic)9781510664814
DOIs
Publication statusPublished - 2023
Event3rd International Conference on Machine Learning and Computer Application, ICMLCA 2022 - Shenyang, China
Duration: 16 Dec 202218 Dec 2022

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12636
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference3rd International Conference on Machine Learning and Computer Application, ICMLCA 2022
Country/TerritoryChina
CityShenyang
Period16/12/2218/12/22

Keywords

  • Dynamic accuracy
  • Laser imaging
  • MEMS mirror
  • Number of wiring harnesses

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