Abstract
A fiber-optic hybrid sensor based on dual-cavity Fabry-Perot interferometers is proposed and demonstrated for the simultaneous measurement of high temperature and high pressure. The proposed sensor is fabricated by fusion splicing of two single-mode fibers (SMFs), a hollow core fiber (HCF), and a coreless fiber (CF), forming a four-section structure of leading SMF-SMF-HCF-CF. A micro-hole is fabricated at the end of the leading SMF using a femtosecond laser, forming an air gap between two SMFs. The CF is thinned and roughened by the femtosecond laser to form a diaphragm. The SMF-based cavity is used as the temperature sensor and the HCF-based cavity as the pressure sensor. Lengths of two cavities are interrogated simultaneously by using the fast Fourier transform-based white-light interferometry. Experimental results show that the proposed sensor exhibits a temperature sensitivity of 19.8 nm/°C and a pressure sensitivity of ∼98 nm/MPa, within the temperature range of 20°C-800°C and the pressure range of 0-10 MPa. The maximum measurement errors of temperature and pressure are 5°C and 0.2 MPa, respectively. As far as we know, it is the first time to detect the temperature of 800°C and the pressure of 10 MPa simultaneously.
| Original language | English |
|---|---|
| Article number | 8493605 |
| Pages (from-to) | 10028-10033 |
| Number of pages | 6 |
| Journal | IEEE Sensors Journal |
| Volume | 18 |
| Issue number | 24 |
| DOIs | |
| Publication status | Published - 15 Dec 2018 |
Keywords
- Fabry-Perot
- Fiber optic sensors
- femtosecond laser fabrication
- pressure measurement
- temperature measurement
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