Double-Layer 90° corrugated terahertz horn antenna based on MEMS technology

Yong Liu; Hong Da Lu; Zi Jian Gao; Kai Zhou; Li Ming Si; Ya Fen Ge; Xin Lv

doi:10.1109/ICMTCE.2013.6812448

Double-Layer 90° corrugated terahertz horn antenna based on MEMS technology

Yong Liu, Hong Da Lu, Zi Jian Gao, Kai Zhou, Li Ming Si, Ya Fen Ge, Xin Lv

School of Integrated Circuits and Electronics

Beijing Institute of Technology

Research output: Contribution to conference › Paper › peer-review

4 Citations (Scopus)

Abstract

A double-layer 90° corrugated terahertz (THz) horn antenna based on MEMS (Micro-electromechanical System) technology is proposed. This antenna is designed at the frequency range of 400GHz-500GHz. Through adding expansion aperture and chokes to the traditional structure, good antenna performance can be obtained. From the simulated result it shows a impedance bandwidth of 400-500GHz with input return loss less than 10dB. The radiation pattern shows good symmetric beamwidth and very low cross-polarization. The peak gain varies from 13.9dBi to 16.1dBi within the frequency band 400GHz-500GHz. Dry etching MEMS technology is suitable for design of this type of antenna.

Original language	English
Pages	331-333
Number of pages	3
DOIs	https://doi.org/10.1109/ICMTCE.2013.6812448
Publication status	Published - 2013
Event	2013 3rd IEEE International Conference on Microwave Technology and Computational Electromagnetics, ICMTCE 2013 - Qingdao, China Duration: 27 Aug 2013 → 29 Aug 2013

Conference

Conference	2013 3rd IEEE International Conference on Microwave Technology and Computational Electromagnetics, ICMTCE 2013
Country/Territory	China
City	Qingdao
Period	27/08/13 → 29/08/13

Keywords

MEMS
corrugated horn
dry etching
terahertz (THz)

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10.1109/ICMTCE.2013.6812448

Cite this

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title = "Double-Layer 90° corrugated terahertz horn antenna based on MEMS technology",

abstract = "A double-layer 90° corrugated terahertz (THz) horn antenna based on MEMS (Micro-electromechanical System) technology is proposed. This antenna is designed at the frequency range of 400GHz-500GHz. Through adding expansion aperture and chokes to the traditional structure, good antenna performance can be obtained. From the simulated result it shows a impedance bandwidth of 400-500GHz with input return loss less than 10dB. The radiation pattern shows good symmetric beamwidth and very low cross-polarization. The peak gain varies from 13.9dBi to 16.1dBi within the frequency band 400GHz-500GHz. Dry etching MEMS technology is suitable for design of this type of antenna.",

keywords = "MEMS, corrugated horn, dry etching, terahertz (THz)",

author = "Yong Liu and Lu, {Hong Da} and Gao, {Zi Jian} and Kai Zhou and Si, {Li Ming} and Ge, {Ya Fen} and Xin Lv",

year = "2013",

doi = "10.1109/ICMTCE.2013.6812448",

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AU - Liu, Yong

AU - Lu, Hong Da

AU - Gao, Zi Jian

AU - Zhou, Kai

AU - Si, Li Ming

AU - Ge, Ya Fen

AU - Lv, Xin

PY - 2013

Y1 - 2013

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AB - A double-layer 90° corrugated terahertz (THz) horn antenna based on MEMS (Micro-electromechanical System) technology is proposed. This antenna is designed at the frequency range of 400GHz-500GHz. Through adding expansion aperture and chokes to the traditional structure, good antenna performance can be obtained. From the simulated result it shows a impedance bandwidth of 400-500GHz with input return loss less than 10dB. The radiation pattern shows good symmetric beamwidth and very low cross-polarization. The peak gain varies from 13.9dBi to 16.1dBi within the frequency band 400GHz-500GHz. Dry etching MEMS technology is suitable for design of this type of antenna.

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KW - corrugated horn

KW - dry etching

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Double-Layer 90° corrugated terahertz horn antenna based on MEMS technology

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Keywords

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