TY - GEN
T1 - Dispersed rayleigh interferometer
AU - Wang, Shanshan
AU - Zhu, Qiudong
AU - Cao, Genrui
PY - 2009
Y1 - 2009
N2 - In order to further improve the performance of Rayleigh Interferometer (RI) used for measurement of gas/liquid index, a Dispersed Rayleigh Interferometer (DRI), which uses a broadband source and disperses monochromatic interference pattern perpendicular to the direction of baseline, is proposed to expand measurement range and to acquire optical path difference dynamically by only one frame of interference pattern. At the same time, an algorithm used to analyse the interference pattern automatically is proposed. A DRI which uses a pair of transmissive phase plates used for generating optical path difference has been built up. The measurement range reaches 200ìm, measurement error is less than 20nm and repeatability is better than 2nm in whole range. Good performance of DRI makes itself to be a suitable approach not only used in the conventional measurement of gas/quid index, but also in other aspects, for example, co-phasing of segmented mirrors for large telescopes.
AB - In order to further improve the performance of Rayleigh Interferometer (RI) used for measurement of gas/liquid index, a Dispersed Rayleigh Interferometer (DRI), which uses a broadband source and disperses monochromatic interference pattern perpendicular to the direction of baseline, is proposed to expand measurement range and to acquire optical path difference dynamically by only one frame of interference pattern. At the same time, an algorithm used to analyse the interference pattern automatically is proposed. A DRI which uses a pair of transmissive phase plates used for generating optical path difference has been built up. The measurement range reaches 200ìm, measurement error is less than 20nm and repeatability is better than 2nm in whole range. Good performance of DRI makes itself to be a suitable approach not only used in the conventional measurement of gas/quid index, but also in other aspects, for example, co-phasing of segmented mirrors for large telescopes.
KW - Dispersed rayleigh interferometer
KW - Interferometer
KW - Optical path difference measurement
UR - https://www.scopus.com/pages/publications/69949115192
U2 - 10.1117/12.828774
DO - 10.1117/12.828774
M3 - Conference contribution
AN - SCOPUS:69949115192
SN - 9780819475435
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies
T2 - 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Y2 - 19 November 2008 through 21 November 2008
ER -