Digital moiré phase-shifting interferometric technique for aspheric testing

Qun Hao*, Yao Hu, Qiu Dong Zhu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

Faster and more accurate optical aspheric testing methods are required in many technical fields. A digital moiré phase-shifting interferometer (DMPSI) with partial compensation lens (PCL) is proposed. With digital phase-shifting technique, only one shot of interferogram is required, so the system structure is simpler with lower sensitivity to the environmental vibration. PCL is designed to enlarge the measurement range of asphericity. A DMPSI prototype in Fizeau configuration has been developed. After calibration, spherical surface is tested with accuracy comparable to Zygo interferometer.

Original languageEnglish
Title of host publicationInnovative Solutions in the Field of Engineering Sciences
PublisherTrans Tech Publications Ltd.
Pages623-628
Number of pages6
ISBN (Print)9783038351511
DOIs
Publication statusPublished - 2014
Event2014 International Conference on Applied Mechanics and Mechanical Automation, AMMA 2014 - Macao, China
Duration: 20 May 201421 May 2014

Publication series

NameApplied Mechanics and Materials
Volume590
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Conference

Conference2014 International Conference on Applied Mechanics and Mechanical Automation, AMMA 2014
Country/TerritoryChina
CityMacao
Period20/05/1421/05/14

Keywords

  • Aspherics
  • Interferometry
  • Moiré techniques
  • Optical inspection
  • Phase measurement

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