Development of precision one-dimensional adjustment worktable based on aerostatic bearing technology

To achieve the high-precision one-dimensional adjustment of large surface under test in optical and mechanical measurements, a novel worktable based on the aerostatic bearing technology is developed. In the worktable, pitch or tilting motion is achieved by a cambered surface of aerostatic bearing and micro-displacement actuators, and the relationship between the angle of one-dimensional adjustment and the displacement of actuators is analyzed. Furthermore, by using an electronic autocollimator, the resolution of one-dimensional adjustment worktable is measured. Errors of the one-dimensional adjustment system are analyzed and the performance evaluation of the system is given. The experimental results show that the worktable has a pitch or tilting adjustment resolution of 1.2″, adjustment range of ±1℃ and good stability with 50 kg load. The developed one-dimensional adjustment worktable can satisfy the requirements of higher precision, high resolution, large adjustment range, frictionless, high load stiffness, stabilization and small driving force.