TY - GEN
T1 - Development of a 3-RRS Micromanipulator Based on Origami-Inspired Spherical Joint
AU - Han, Haoqi
AU - Liu, Xiaoming
AU - Chen, Yan
AU - Pang, Hao
AU - Tang, Xiaoqing
AU - Liu, Dan
AU - Huang, Qiang
AU - Arai, Tatsuo
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - In recent years, micromanipulation technology has achieved extensive applications in industry and life science. Improving the precision and bandwidth of the micromanipulator and simultaneously reducing size, weight, and cost pose significant challenges to the existing micromanipulator design and fabrication methods. Here, we propose a 3-RRS micromanipulator with an origami-inspired spherical joint based on the PC-MEMS process, aiming for miniaturization and cost-effectiveness. The spherical joint allows rotations of 140° around the x-axis approximately, 140° around the y-axis approximately, and 20° around the z-axis approximately. The micromanipulator has weights of 0.8 g, dimensions of 16 mm × 16 mm × 22 mm, and workspace of 0.7 mm3. The end platform of the micromanipulator can be equipped with various effectors to accomplish different kinds of tasks. Experimental results validated its high precision and bandwidth, exhibiting its potential to perform intricate micromanipulation tasks.
AB - In recent years, micromanipulation technology has achieved extensive applications in industry and life science. Improving the precision and bandwidth of the micromanipulator and simultaneously reducing size, weight, and cost pose significant challenges to the existing micromanipulator design and fabrication methods. Here, we propose a 3-RRS micromanipulator with an origami-inspired spherical joint based on the PC-MEMS process, aiming for miniaturization and cost-effectiveness. The spherical joint allows rotations of 140° around the x-axis approximately, 140° around the y-axis approximately, and 20° around the z-axis approximately. The micromanipulator has weights of 0.8 g, dimensions of 16 mm × 16 mm × 22 mm, and workspace of 0.7 mm3. The end platform of the micromanipulator can be equipped with various effectors to accomplish different kinds of tasks. Experimental results validated its high precision and bandwidth, exhibiting its potential to perform intricate micromanipulation tasks.
UR - https://www.scopus.com/pages/publications/85202445136
U2 - 10.1109/ICRA57147.2024.10610385
DO - 10.1109/ICRA57147.2024.10610385
M3 - Conference contribution
AN - SCOPUS:85202445136
T3 - Proceedings - IEEE International Conference on Robotics and Automation
SP - 15636
EP - 15641
BT - 2024 IEEE International Conference on Robotics and Automation, ICRA 2024
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2024 IEEE International Conference on Robotics and Automation, ICRA 2024
Y2 - 13 May 2024 through 17 May 2024
ER -