Design, simulation and multi-dimension coupling research of monolithic MEMS three-axis high-G accelerometer

Three-axis high-G MEMS, silicon, piezoresistive accelerometer was developed in order to measure integrated accelerometer signal of the penetration process of the body of the missile of hard-target penetration weapon. On the basis of analyzing the disadvantage of other structural accelerometer in some literatures, a new design of E shape diaphragm structure of accelerometer was put forward. The accelerometer's structure, working principle and multi-dimension coupling were discussed. The structural size of the sense element was fixed by transient analysis, modal analysis and static analysis. This design could synchronously measure the acceleration in triaxial directions by utilizing three sets of Wheatstone bridge which were disposed on the sense element reasonably, and could eliminate transverse axial sensitivity. The simulation results indicated that the accelerometer is testified to have so many merits, such as great capability of bearing over loading, low transverse sensitivity coefficient, and so forth.