Design and vibration analysis of a micromachined tuning fork gyroscope with anchored coupling mechanism

Yaping Zhang, Haipeng Liu*, Yanwei Guan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

A micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) with anchored coupling mechanism was designed and its mode ordering and vibration sensitivity were investigated. The proposed TFG prioritizes the anti-phase drive-mode using a levered mechanism while the sense-mode is prioritized using an anchored coupling ring spring linked by four linear beams to improve the mode ordering. The in-phase frequency of the anchored coupling TFG is improved by 30% than the anti-phase frequency in the sense direction. The second order vibration differential equation of the tuning fork gyroscope was established and solved by using the coordinate transformation method. The simulations and analytical results demonstrate that the vibration output is reduced by 74.8 and 88.0% in the anti-phase mode and in-phase mode frequencies, respectively. The anchored coupling TFG can improve the mode ordering and greatly suppress the vibration output.

Original languageEnglish
Pages (from-to)232-237
Number of pages6
JournalZhendong yu Chongji/Journal of Vibration and Shock
Volume36
Issue number21
DOIs
Publication statusPublished - 15 Nov 2017

Keywords

  • Anchored coupling mechanism
  • Coordinate transformation method
  • Mode ordering
  • Tuning fork gyroscope
  • Vibration sensitivity

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