Design and vibration analysis of a micromachined tuning fork gyroscope with anchored coupling mechanism

A micro-electro-mechanical system (MEMS) tuning fork gyroscope (TFG) with anchored coupling mechanism was designed and its mode ordering and vibration sensitivity were investigated. The proposed TFG prioritizes the anti-phase drive-mode using a levered mechanism while the sense-mode is prioritized using an anchored coupling ring spring linked by four linear beams to improve the mode ordering. The in-phase frequency of the anchored coupling TFG is improved by 30% than the anti-phase frequency in the sense direction. The second order vibration differential equation of the tuning fork gyroscope was established and solved by using the coordinate transformation method. The simulations and analytical results demonstrate that the vibration output is reduced by 74.8 and 88.0% in the anti-phase mode and in-phase mode frequencies, respectively. The anchored coupling TFG can improve the mode ordering and greatly suppress the vibration output.