TY - JOUR
T1 - Design and Optimization of Interdigital Capacitive Humidity Sensor with Highly Sensitive and Dynamic Response Time
AU - Li, Dapeng
AU - Chen, Aobei
AU - Zheng, Dezhi
AU - Li, Zhongxiang
AU - Na, Rui
AU - Cui, Fei
AU - Yang, Xiaojun
N1 - Publisher Copyright:
© 2022 by the authors.
PY - 2022/12
Y1 - 2022/12
N2 - Humidity sensors are widely used in various fields of life. In meteorological detection, the sensor must have high sensitivity and fast dynamic response time due to extreme environmental interference. However, the sensitive mechanism of the humidity sensor determines that the dynamic response time will inevitably be increased while improving the sensitivity, which undoubtedly creates difficulties for sensor design. This article takes the interdigitated capacitive humidity sensor as the research object and proposes an optimal design scheme for the sensor that considers high dynamic response time and sensitivity. By constructing the sensor’s theoretical mathematical model, the influence of each structure is analyzed. The theoretical model has been verified by finite element simulation to have an accuracy higher than 95%. The article constructs the sensor optimization objective equation based on this model. Through analysis, within the range of structural parameters set in the article, to improve the sensitivity and reduce the dynamic response time of the sensor, the width and spacing of the interdigital electrodes should have a minimum value of 3 μm and a maximum value of 14 μm, respectively. The thickness of the electrode layer and the moisture-sensitive layer should be flexibly adjusted according to the application to ensure the lowest value of the optimization objective function. To further improve the sensor’s performance, the article optimizes the electrode structure and heating strategy of the sensor heating layer, which not only enhances the uniformity of heat transfer but also increases the optimal heat transfer area by 6% compared with the traditional scheme.
AB - Humidity sensors are widely used in various fields of life. In meteorological detection, the sensor must have high sensitivity and fast dynamic response time due to extreme environmental interference. However, the sensitive mechanism of the humidity sensor determines that the dynamic response time will inevitably be increased while improving the sensitivity, which undoubtedly creates difficulties for sensor design. This article takes the interdigitated capacitive humidity sensor as the research object and proposes an optimal design scheme for the sensor that considers high dynamic response time and sensitivity. By constructing the sensor’s theoretical mathematical model, the influence of each structure is analyzed. The theoretical model has been verified by finite element simulation to have an accuracy higher than 95%. The article constructs the sensor optimization objective equation based on this model. Through analysis, within the range of structural parameters set in the article, to improve the sensitivity and reduce the dynamic response time of the sensor, the width and spacing of the interdigital electrodes should have a minimum value of 3 μm and a maximum value of 14 μm, respectively. The thickness of the electrode layer and the moisture-sensitive layer should be flexibly adjusted according to the application to ensure the lowest value of the optimization objective function. To further improve the sensor’s performance, the article optimizes the electrode structure and heating strategy of the sensor heating layer, which not only enhances the uniformity of heat transfer but also increases the optimal heat transfer area by 6% compared with the traditional scheme.
KW - design and optimization
KW - high dynamic
KW - high sensitivity
KW - humidity sensor
UR - http://www.scopus.com/inward/record.url?scp=85143720957&partnerID=8YFLogxK
U2 - 10.3390/app122312362
DO - 10.3390/app122312362
M3 - Article
AN - SCOPUS:85143720957
SN - 2076-3417
VL - 12
JO - Applied Sciences (Switzerland)
JF - Applied Sciences (Switzerland)
IS - 23
M1 - 12362
ER -