Abstract
This article introduces a technique for iterative high precision freeform lens polishing, with operations alternating between a fabrication and a measurement unit. The technique is implemented using a Magnetorheological Jet Polishing (MJP) machine as fabrication unit, and a sub-aperture stitching interferometric system as measurement unit. The two units are separately located and have different internal coordinate references. Precision integration of the two is the key to realize high performance iterative polishing. In our study, application of the proposed technique yields a peak to valley (PV) value of 1/7λ in polishing flat optical elements.
Original language | English |
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Pages (from-to) | 195-205 |
Number of pages | 11 |
Journal | International Journal of Optomechatronics |
Volume | 8 |
Issue number | 3 |
DOIs | |
Publication status | Published - Jul 2014 |
Externally published | Yes |
Keywords
- MJP
- freeform polishing
- interferometric measurement
- optical lens fabrication
- polishing path generation