Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT

Haoran Wang, Yuanyuan Yu, Zhenfang Chen, Hao Yang, Huabei Jiang, Huikai Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

19 Citations (Scopus)

Abstract

This paper presents a piezoelectric micromachined ultrasonic transducer (pMUT) array fabricated using high-piezoelectric-coefficient ceramic PZT wafers. A new process for polishing ceramic PZT layers down to 5 μm has been developed and applied for manufacturing high-sensitivity pMUTs. A 2 MHz working pMUT array (8× 8 elements) based on ceramic PZT has been designed, modeled, fabricated and characterized.

Original languageEnglish
Title of host publication2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538647073
DOIs
Publication statusPublished - 26 Dec 2018
Externally publishedYes
Event17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India
Duration: 28 Oct 201831 Oct 2018

Publication series

NameProceedings of IEEE Sensors
Volume2018-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference17th IEEE SENSORS Conference, SENSORS 2018
Country/TerritoryIndia
CityNew Delhi
Period28/10/1831/10/18

Keywords

  • ceramic PZT
  • micromachined transducers
  • pMUT
  • piezoelectric
  • ultrasonic transducers

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