Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

Sagnik Pal; Huikai Xie

doi:10.1109/TRANSDUCERS.2011.5969768

Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

Sagnik Pal^*, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 μm major axis and 142 μm minor axis. The micromirror has an optical scan angle of 22 at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is only 14.5 μm at an optical scan angle of 22°. The curved actuator shape maximizes chip-area utilization and ensures a high resonant frequency. The first three resonant modes are at 3.9 kHz, 8.6 kHz and 17 kHz. Two-dimensional (2D) optical scanning is demonstrated using the second and third resonant modes.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	2550-2553
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969768
Publication status	Published - 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

Curved multimorph
electrothermal
micromirror

Access to Document

10.1109/TRANSDUCERS.2011.5969768

Cite this

Pal, S., & Xie, H. (2011). Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2550-2553). Article 5969768 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969768

@inproceedings{7bf07c449f8f4041852d3a5fee50021f,

title = "Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift",

abstract = "We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 μm major axis and 142 μm minor axis. The micromirror has an optical scan angle of 22 at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is only 14.5 μm at an optical scan angle of 22°. The curved actuator shape maximizes chip-area utilization and ensures a high resonant frequency. The first three resonant modes are at 3.9 kHz, 8.6 kHz and 17 kHz. Two-dimensional (2D) optical scanning is demonstrated using the second and third resonant modes.",

keywords = "Curved multimorph, electrothermal, micromirror",

author = "Sagnik Pal and Huikai Xie",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969768",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "2550--2553",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Pal, S & Xie, H 2011, Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969768, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 2550-2553, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969768

Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift. / Pal, Sagnik; Xie, Huikai.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2550-2553 5969768 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

AU - Pal, Sagnik

AU - Xie, Huikai

PY - 2011

Y1 - 2011

N2 - We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 μm major axis and 142 μm minor axis. The micromirror has an optical scan angle of 22 at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is only 14.5 μm at an optical scan angle of 22°. The curved actuator shape maximizes chip-area utilization and ensures a high resonant frequency. The first three resonant modes are at 3.9 kHz, 8.6 kHz and 17 kHz. Two-dimensional (2D) optical scanning is demonstrated using the second and third resonant modes.

AB - We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 μm major axis and 142 μm minor axis. The micromirror has an optical scan angle of 22 at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is only 14.5 μm at an optical scan angle of 22°. The curved actuator shape maximizes chip-area utilization and ensures a high resonant frequency. The first three resonant modes are at 3.9 kHz, 8.6 kHz and 17 kHz. Two-dimensional (2D) optical scanning is demonstrated using the second and third resonant modes.

KW - Curved multimorph

KW - electrothermal

KW - micromirror

UR - http://www.scopus.com/inward/record.url?scp=80052135510&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2011.5969768

DO - 10.1109/TRANSDUCERS.2011.5969768

M3 - Conference contribution

AN - SCOPUS:80052135510

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 2550

EP - 2553

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Y2 - 5 June 2011 through 9 June 2011

ER -

Pal S, Xie H. Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2550-2553. 5969768. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969768

Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this