@inproceedings{77c315c2d53f42df8ecc3c68d816a9e0,
title = "Design and characterization of low dynamic deformation electrostatic micromirrors",
abstract = "Dynamic deformation of micromirrors is critical for high-performance display applications. A dual gimbal-frame electrostatic micromirror design that can reduce dynamic deformation is proposed and fabricated. Experiments show that the spot quality reflected from the mirror surfaces can be improved by the fabricated micromirrors.",
keywords = "dynamic deformation, micromirror, spot quality",
author = "Hua Wang and Yingchao Cao and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 ; Conference date: 28-07-2024 Through 01-08-2024",
year = "2024",
doi = "10.1109/OMN61224.2024.10685255",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024",
address = "United States",
}