Abstract
By electrolysis of the methanol solution, an attempt was made to deposit diamondlike carbon (DLC) films on silicon substrate at temperature of less than 60°C. Substrates were negatively biased with a dc potential of 0 to -3000 V. IR spectra showed that the O-H, C-H, and C-O vibration bands of electrolyte decreased remarkably after electrolysis and a new peak characterized as the C = C bond appeared. The deposited films were characterized as DLC films by Raman spectroscopy.
Original language | English |
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Pages (from-to) | 1074-1076 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 69 |
Issue number | 8 |
DOIs | |
Publication status | Published - 19 Aug 1996 |