Deposition of diamond-like carbon films by electrolysis of methanol solution

Hao Wang*, Ming Rong Shen, Zhao Yuan Ning, Chao Ye, Chuan Bao Cao, Hai Yan Dang, He Sun Zhu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

146 Citations (Scopus)

Abstract

By electrolysis of the methanol solution, an attempt was made to deposit diamondlike carbon (DLC) films on silicon substrate at temperature of less than 60°C. Substrates were negatively biased with a dc potential of 0 to -3000 V. IR spectra showed that the O-H, C-H, and C-O vibration bands of electrolyte decreased remarkably after electrolysis and a new peak characterized as the C = C bond appeared. The deposited films were characterized as DLC films by Raman spectroscopy.

Original languageEnglish
Pages (from-to)1074-1076
Number of pages3
JournalApplied Physics Letters
Volume69
Issue number8
DOIs
Publication statusPublished - 19 Aug 1996

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