Customizable sub-nanometer vertical-step grayscale lithography

Haonan Ma; Shijie Zhao; Xia Liu; Ziying Hu; Xu Han; Hongtao Li; Zeming Jin; Mingdi Zhang; Jixiang Li; Wenke Fu; Yunyun Dai; Yuan Huang; Yeliang Wang

doi:10.1016/j.scib.2026.01.044

Customizable sub-nanometer vertical-step grayscale lithography

Haonan Ma
, Shijie Zhao
, Xia Liu^*
, Ziying Hu
, Xu Han
, Hongtao Li
, Zeming Jin
, Mingdi Zhang
, Jixiang Li
, Wenke Fu
, Yunyun Dai
, Yuan Huang
, Yeliang Wang

^*Corresponding author for this work

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Science Bulletin
DOIs	https://doi.org/10.1016/j.scib.2026.01.044
Publication status	Accepted/In press - 2026
Externally published	Yes

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10.1016/j.scib.2026.01.044

Cite this

@article{4f43676bcb1b4f5b9e3acc3a531584df,

title = "Customizable sub-nanometer vertical-step grayscale lithography",

author = "Haonan Ma and Shijie Zhao and Xia Liu and Ziying Hu and Xu Han and Hongtao Li and Zeming Jin and Mingdi Zhang and Jixiang Li and Wenke Fu and Yunyun Dai and Yuan Huang and Yeliang Wang",

year = "2026",

doi = "10.1016/j.scib.2026.01.044",

language = "English",

journal = "Science Bulletin",

issn = "2095-9273",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Customizable sub-nanometer vertical-step grayscale lithography

AU - Ma, Haonan

AU - Zhao, Shijie

AU - Liu, Xia

AU - Hu, Ziying

AU - Han, Xu

AU - Li, Hongtao

AU - Jin, Zeming

AU - Zhang, Mingdi

AU - Li, Jixiang

AU - Fu, Wenke

AU - Dai, Yunyun

AU - Huang, Yuan

AU - Wang, Yeliang

PY - 2026

Y1 - 2026

UR - https://www.scopus.com/pages/publications/105029045092

U2 - 10.1016/j.scib.2026.01.044

DO - 10.1016/j.scib.2026.01.044

M3 - Article

AN - SCOPUS:105029045092

SN - 2095-9273

JO - Science Bulletin

JF - Science Bulletin

ER -

Customizable sub-nanometer vertical-step grayscale lithography

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