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Computer simulation of phase-shift algorithm

  • Gang Wang*
  • , Ji Xiang Yan
  • *Corresponding author for this work
  • Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

When applying phase-stepping interferometry to measure wavefront with aberration, distortion is caused by various factors and the main one is phase-shifting error from phase shifter. In this paper, the calculation theory and consequence in measurement error of the phase shift algorithm are discussed. These algorithms include traditional three-phase algorithm, traditional four-phase algorithm, traditional five-phase algorithm, carre algorithm, new compensating four-phase algorithm and new compensating five-phase algorithm. According to the theory analysis and computer stimulation, these methods are compared through introduce phase-shifting error, wavefront aberration and Gauss noise, the results show the new compensating five-phase algorithm is immune to phase-shifting error, and its result is insensitive to Gauss noise, it can improve measurement accuracy effectively.

Original languageEnglish
Title of host publicationOptical Metrology and Inspection for Industrial Applications
DOIs
Publication statusPublished - 2010
EventOptical Metrology and Inspection for Industrial Applications - Beijing, China
Duration: 18 Oct 2010 → 20 Oct 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7855
ISSN (Print)0277-786X

Conference

ConferenceOptical Metrology and Inspection for Industrial Applications
Country/TerritoryChina
CityBeijing
Period18/10/10 → 20/10/10

Keywords

  • computer stimulation
  • phase shift algorithm
  • phase-shifting error

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