Computer aided alignment of 20X Schwarzschild projection optics

Ke Liu; Yanqiu Li; Jingfeng Liu; Cuifang Kuang

doi:10.1117/12.819705

Computer aided alignment of 20X Schwarzschild projection optics

Ke Liu
, Yanqiu Li^*
, Jingfeng Liu
, Cuifang Kuang

^*Corresponding author for this work

School of Optics and Photonics

CAS - Institute of Electrical Engineering
University of Chinese Academy of Sciences
Beijing Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

10 Citations (Scopus)

Abstract

An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.

Original language	English
Article number	713042
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7130
DOIs	https://doi.org/10.1117/12.819705
Publication status	Published - 2008
Event	4th International Symposium on Precision Mechanical Measurements - Hefei/Jiuhua Mountain, Anhui, China Duration: 25 Aug 2008 → 29 Aug 2009

Keywords

Computer aided alignment
FRINGE Zernike coefficients
Optical system assembly and alignment
Singular value decomposition

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10.1117/12.819705

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title = "Computer aided alignment of 20X Schwarzschild projection optics",

abstract = "An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.",

keywords = "Computer aided alignment, FRINGE Zernike coefficients, Optical system assembly and alignment, Singular value decomposition",

author = "Ke Liu and Yanqiu Li and Jingfeng Liu and Cuifang Kuang",

year = "2008",

doi = "10.1117/12.819705",

language = "English",

volume = "7130",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "4th International Symposium on Precision Mechanical Measurements ; Conference date: 25-08-2008 Through 29-08-2009",

}

TY - JOUR

T1 - Computer aided alignment of 20X Schwarzschild projection optics

AU - Liu, Ke

AU - Li, Yanqiu

AU - Liu, Jingfeng

AU - Kuang, Cuifang

PY - 2008

Y1 - 2008

N2 - An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.

AB - An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.

KW - Computer aided alignment

KW - FRINGE Zernike coefficients

KW - Optical system assembly and alignment

KW - Singular value decomposition

UR - https://www.scopus.com/pages/publications/60649092988

U2 - 10.1117/12.819705

DO - 10.1117/12.819705

M3 - Conference article

AN - SCOPUS:60649092988

SN - 0277-786X

VL - 7130

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 713042

T2 - 4th International Symposium on Precision Mechanical Measurements

Y2 - 25 August 2008 through 29 August 2009

ER -

Computer aided alignment of 20X Schwarzschild projection optics

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Keywords

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