Comparison of double layer in argon helicon plasma and magnetized DC discharge plasma

Yueqing Wang, Ruilin Cui, Ruoyu Han, Feng He, Tianliang Zhang, Jinsong Miao, Jiting Ouyang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

We present in this paper the comparison of an electric double layer (DL) in argon helicon plasma and magnetized direct current (DC) discharge plasma. DL in high-density argon helicon plasma of 13.56 MHz RF discharge was investigated experimentally by a floating electrostatic probe and local optical emission spectroscopy (LOES). The DL characteristics at different operating parameters, including RF power (300-1500 W), tube diameter (8-60 mm), and external magnetic field (0-300 G), were measured. For comparison, DL in magnetized plasma channel of a DC discharge under different conditions was also measured experimentally. The results show that in both cases, DL appears in a divergent magnetic field where the magnetic field gradient is the largest and when the plasma density is sufficiently high. DL strength (or potential drop of DL) increases with the magnetic field in two different structures. It is suggested that the electric DL should be a common phenomenon in dense plasma under a gradient external magnetic field. DL in magnetized plasmas can be controlled properly by magnetic field structure and discharge mode (hence the plasma density).

Original languageEnglish
Article number035401
JournalPlasma Science and Technology
Volume24
Issue number3
DOIs
Publication statusPublished - Mar 2022

Keywords

  • OES
  • diverging magnetic field
  • double layer
  • electrostatic probe
  • helicon plasma
  • magnetized plasma

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