CMOS MEMS Fabrication Technologies

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Encyclopedia of Nanotechnology
Publisher	Springer Science+Business Media
Pages	441-449
Number of pages	9
ISBN (Electronic)	9789048197514
ISBN (Print)	9789048197507
DOIs	https://doi.org/10.1007/978-90-481-9751-4_310
Publication status	Published - 1 Jan 2012
Externally published	Yes

Access to Document

@inbook{35bf938053084dbf864e72a65ee84b63,

title = "CMOS MEMS Fabrication Technologies",

author = "Hongwei Qu and Huikai Xie",

year = "2012",

month = jan,

day = "1",

doi = "10.1007/978-90-481-9751-4\_310",

language = "English",

isbn = "9789048197507",

pages = "441--449",

booktitle = "Encyclopedia of Nanotechnology",

publisher = "Springer Science+Business Media",

}

TY - CHAP

T1 - CMOS MEMS Fabrication Technologies

AU - Qu, Hongwei

AU - Xie, Huikai

PY - 2012/1/1

Y1 - 2012/1/1

UR - https://www.scopus.com/pages/publications/105011803273

U2 - 10.1007/978-90-481-9751-4_310

DO - 10.1007/978-90-481-9751-4_310

M3 - Chapter

AN - SCOPUS:105011803273

SN - 9789048197507

SP - 441

EP - 449

BT - Encyclopedia of Nanotechnology

PB - Springer Science+Business Media

ER -