CMOS MEMS Fabrication Technologies

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Encyclopedia of Nanotechnology
Publisher	Springer Netherlands
Pages	540-549
Number of pages	10
ISBN (Electronic)	9789401797801
ISBN (Print)	9789401797795
DOIs	https://doi.org/10.1007/978-94-017-9780-1_310
Publication status	Published - 1 Jan 2016
Externally published	Yes

Access to Document

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title = "CMOS MEMS Fabrication Technologies",

author = "Hongwei Qu and Huikai Xie",

year = "2016",

month = jan,

day = "1",

doi = "10.1007/978-94-017-9780-1\_310",

language = "English",

isbn = "9789401797795",

pages = "540--549",

booktitle = "Encyclopedia of Nanotechnology",

publisher = "Springer Netherlands",

address = "Netherlands",

}

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T1 - CMOS MEMS Fabrication Technologies

AU - Qu, Hongwei

AU - Xie, Huikai

PY - 2016/1/1

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U2 - 10.1007/978-94-017-9780-1_310

DO - 10.1007/978-94-017-9780-1_310

M3 - Chapter

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SN - 9789401797795

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EP - 549

BT - Encyclopedia of Nanotechnology

PB - Springer Netherlands

ER -