Abstract
This paper investigates the calibration of the parallel mechanism stage which is set up under the microscope. The calibration method uses position data of the x and y-axis and orientation data of z-axis only using measurement method with the micro grid pattern. This paper discusses its calibration method with experiments for the stage constructed a fixed linear actuated parallel mechanism. The results show that the calibration using limited data is possible and has good performance.
Original language | English |
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Pages (from-to) | 380-389 |
Number of pages | 10 |
Journal | Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
Volume | 75 |
Issue number | 750 |
DOIs | |
Publication status | Published - Feb 2009 |
Externally published | Yes |
Keywords
- Absolute Accuracy
- Calibration
- Identification
- Measurement
- Mechatronics and Robotics
- Parallel Mechanism
- Positioning