C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

J. Zhu; C. Jiang; J. Han; J. Liang

doi:10.1007/s00339-007-4094-6

C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

J. Zhu^*
, C. Jiang
, J. Han
, J. Liang

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp ³ bonding configurations.

Original language	English
Pages (from-to)	497-501
Number of pages	5
Journal	Applied Physics A: Materials Science and Processing
Volume	89
Issue number	2
DOIs	https://doi.org/10.1007/s00339-007-4094-6
Publication status	Published - Nov 2007
Externally published	Yes

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@article{75b5f1639ffb4724ac76023c6de9937f,

title = "C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films",

abstract = "The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp 3 bonding configurations.",

author = "J. Zhu and C. Jiang and J. Han and J. Liang",

year = "2007",

month = nov,

doi = "10.1007/s00339-007-4094-6",

language = "English",

volume = "89",

pages = "497--501",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

number = "2",

}

TY - JOUR

T1 - C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

AU - Zhu, J.

AU - Jiang, C.

AU - Han, J.

AU - Liang, J.

PY - 2007/11

Y1 - 2007/11

N2 - The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp 3 bonding configurations.

AB - The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp 3 bonding configurations.

UR - https://www.scopus.com/pages/publications/34548259902

U2 - 10.1007/s00339-007-4094-6

DO - 10.1007/s00339-007-4094-6

M3 - Article

AN - SCOPUS:34548259902

SN - 0947-8396

VL - 89

SP - 497

EP - 501

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 2

ER -

C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films

Abstract

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