Abstract
A general laser deflectometry method was developed for testing aspheric surface. Addressing to various aspheric surfaces, three schemes were proposed: translating, rotating and rotating with translating schemes. The method is versatile and can be used in testing of various aspheric surface. The measurement of laser reflecting angle that has significant effect on precision of aspheric surface casting was studied in detail. Experimental results exhibited that the accuracy of the method can attain λ/5-λ/10 that is close to interferometry.
Original language | English |
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Pages (from-to) | 22-23+27 |
Journal | Guangxue Jishu/Optical Technique |
Volume | 28 |
Issue number | 1 |
Publication status | Published - Jan 2002 |
Keywords
- Aspheric surface
- Laser deflectometry
- Linear array CCD