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Application of laser diode fiber alignment in measuring large-scale perpendicularity and parallelism

  • Qun Hao*
  • , Rong Liang
  • , Mang Cao
  • , Dacheng Li
  • *Corresponding author for this work
  • Tsinghua University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, a system for measuring perpendicularity and parallelism derivation using a laser diode fiber aligned beam and CCD detector is described. A stable aligned laser diode beam is used to form datum planes by rotating scanner equipped with pentagonal prism. Using a linear array CCD detector as the sensing probe, the system can detect the deviation of height related to the datum plane directly and absolutely. The experiment result is shown in the paper.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsFrederick Y. Wu, Shenghua Ye
Pages2-5
Number of pages4
Publication statusPublished - 1996
Externally publishedYes
EventAutomated Optical Inspection for Industry - Beijing, China
Duration: 6 Nov 1996 → 7 Nov 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2899
ISSN (Print)0277-786X

Conference

ConferenceAutomated Optical Inspection for Industry
CityBeijing, China
Period6/11/96 → 7/11/96

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