TY - GEN
T1 - Application of global optimization algorithms for optical thin film index determination from spectro-photometric analysis
AU - Gao, Lihong
AU - Lemarchand, Fabien
AU - Lequime, Michel
PY - 2011
Y1 - 2011
N2 - A large number of parameters is often required to describe optical dispersion laws, and it is only through the use of an appropriate global optimization procedure that an accurate thin film index determination can be achieved. In this paper, we propose to investigate the respective performances of three different optimization algorithms, namely Simulated Annealing, Genetic Algorithm and Clustering Global Optimization and compare results with a commercial software dedicated to thin film index determination. This study refers to the single layer and multilayer thin film index determination. It includes the theoretical study of simulated reflection and transmission spectra, and the experimental characterization of Ta2O5 single layer and Ta2O5/SiO2 multilayer.
AB - A large number of parameters is often required to describe optical dispersion laws, and it is only through the use of an appropriate global optimization procedure that an accurate thin film index determination can be achieved. In this paper, we propose to investigate the respective performances of three different optimization algorithms, namely Simulated Annealing, Genetic Algorithm and Clustering Global Optimization and compare results with a commercial software dedicated to thin film index determination. This study refers to the single layer and multilayer thin film index determination. It includes the theoretical study of simulated reflection and transmission spectra, and the experimental characterization of Ta2O5 single layer and Ta2O5/SiO2 multilayer.
KW - Refractive index determination
KW - Thin films optical properties
UR - https://www.scopus.com/pages/publications/80455132079
U2 - 10.1117/12.896832
DO - 10.1117/12.896832
M3 - Conference contribution
AN - SCOPUS:80455132079
SN - 9780819487940
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Optical Thin Films IV
T2 - Advances in Optical Thin Films IV
Y2 - 5 September 2011 through 7 September 2011
ER -