Application of AZ4903 to production of stator windings

To satisfy the needs of the high deep-width ratio and thickness of a planar micromotor's stator windings, a process method to produce an electromagnetic planar micromotor with AZ4903 is proposed. Optimum relationships, such as the desired rotation speed vs. thickness of the coating process, and the temperature vs. time of pre-baking, are obtained. The appropriate time of lithography and development are also achieved. The thickness of the produced windings is 40 μm with ideal perpendicularity. Finally, stators and rotors are fabricated. The rotation speed and pull-out torque of the micromotor are tested. The experiment proved that the micromotor worked with a steady speed and a low ripple of pull-out torque.