ANSYS simulation of the capacitance coupling of quartz tuning fork gyroscope

Qing Zhang, Lihui Feng*, Ke Zhao, Fang Cui, Yu Nan Sun

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Coupling error is one of the main error sources of the quartz tuning fork gyroscope. The mechanism of capacitance coupling error is analyzed in this article. Finite Element Method (FEM) is used to simulate the structure of the quartz tuning fork by ANSYS software. The voltage output induced by the capacitance coupling is simulated with the harmonic analysis and characteristics of electrical and mechanical parameters influenced by the capacitance coupling between drive electrodes and sense electrodes are discussed with the transient analysis.

Original languageEnglish
Title of host publication2013 International Conference on Optical Instruments and Technology
Subtitle of host publicationOptical Sensors and Applications
PublisherSPIE
ISBN (Print)9780819499622
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications - Beijing, China
Duration: 17 Nov 201319 Nov 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9044
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications
Country/TerritoryChina
CityBeijing
Period17/11/1319/11/13

Keywords

  • ANSYS simulation
  • static electricity coupling
  • tuning fork

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