Abstract
To get high quality quartz tuning forks, mechanical coupling error and frequency excursion by machining errors must be resolved. The lengths and the widths of driving forks are measured with measuring microscopes in the main machining processes. The chemical etching of quartz is the main reason of machining errors. The result gotten by the simulation model which is built by the finite element method considering machining errors is closer to the testing data. The mechanical coupling error is eliminated effectively by mass balancing method which could compensate the machining errors, and the performance of quartz tuning fork gyroscope is improved.
Original language | English |
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Pages (from-to) | 41-44 |
Number of pages | 4 |
Journal | Weixi Jiagong Jishu/Microfabrication Technology |
Issue number | 5 |
Publication status | Published - Oct 2008 |
Keywords
- Chemical etching
- Finite element method
- Machining error
- Tuning fork