Analysis of the influences of machining errors for quartz tuning fork gyroscope

Wen Yi Lu*, Fang Cui, Hai Yan, Li Hui Feng, Yu Nan Sun

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

To get high quality quartz tuning forks, mechanical coupling error and frequency excursion by machining errors must be resolved. The lengths and the widths of driving forks are measured with measuring microscopes in the main machining processes. The chemical etching of quartz is the main reason of machining errors. The result gotten by the simulation model which is built by the finite element method considering machining errors is closer to the testing data. The mechanical coupling error is eliminated effectively by mass balancing method which could compensate the machining errors, and the performance of quartz tuning fork gyroscope is improved.

Original languageEnglish
Pages (from-to)41-44
Number of pages4
JournalWeixi Jiagong Jishu/Microfabrication Technology
Issue number5
Publication statusPublished - Oct 2008

Keywords

  • Chemical etching
  • Finite element method
  • Machining error
  • Tuning fork

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