@inproceedings{2be69968cd0149abb4129e1fc540022b,
title = "An Ultra-Low Total Harmonic Distortion Piezoelectric MEMS Loudspeaker with Double-S Unimorph Actuators",
abstract = "This paper presents an ultra-low total harmonic distortion (THD) piezoelectric MEMS loudspeaker designed for in-ear applications, featuring double-S unimorph piezoelectric actuators. With a square diaphragm of 3 mm in length and a 2.7 μm-thick sputtered PZT, the double-S actuators exhibit piston vibration with THD <0.75\% for the sound pressure level (SPL) over 88 dB with 3 Vpp excitation across 1-20 kHz. This design validates the feasibility of achieving ultra-low THD performance in MEMS piezoelectric loudspeakers through a piston-vibration-based structural design.",
keywords = "MEMS loudspeaker, Piezoelectric, sound pressure level, SPL, THD, total harmonic distortion",
author = "Qincheng Zheng and Ke Cao and Ning Deng and Chenyu Bai and Yao Lu and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",
year = "2025",
doi = "10.1109/MEMS61431.2025.10917573",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "799--801",
booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",
address = "United States",
}