@inproceedings{90110ca4460640009009597d2dea97b1,
title = "An overlapping technique to measure the parallelism of surface elements in a large area based on comparison goniometer",
abstract = "Comparison goniometer, precision autocollimator, can be used to measure parallelism or angular error. If the size of the work piece to be measured is larger than the aperture of the objective lens, the measurement can not be carried through, because a part of work piece can't be observed. A new technique, called overlapping measurement technique, is proposed. The work piece will be moved, and two adjacent measurements must have an intercross. The relationship between the readings of the autocollimator and the angular error has been deduced. A program written in VC++6.0 will be used to process the measurement data.",
keywords = "Comparison goniometer, angular error, intercross, mirror surfaces, overlapping measurement technique, parallelism of surface, precision autocollimator, reflecting mirror",
author = "Wang, {Zhi Shan} and Zhao, {Yue Jin} and Zhuo Li and Liquan Dong and Xuhong Chu",
year = "2010",
doi = "10.1117/12.860077",
language = "English",
isbn = "9780819482631",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Instrumentation, Metrology, and Standards for Nanomanufacturing IV",
note = "Instrumentation, Metrology, and Standards for Nanomanufacturing IV ; Conference date: 02-08-2010 Through 04-08-2010",
}