An optimizition method for natural frequecy of MEMS high-g accelerometer

ecause of the low natural frequency of the MEMS high-g acceleration sensors, the resonance phenomenon occurs during the test. In the text, the parameters of the special structure of the sensor on the impact of the natural frequency is analyzed, and a method of optimizing the natural frequency is put forward. The main point is to reduce the quality of proof mass and optimize the ratio of the thickness and length of the beam, which optimizes the natural frequency of the sensor. The optimizition method was validated that the natural frequency of the structure can be improved from 330 kHz to 550 kHz by theoretic analysis. After being optimizated, the output signal of the high-g accelerometer was tested at 20 000 g_n and 150 000 g_n by using the dynamic test systems. The experiment shows that the optimization method can improve the natural frequency of the structure of the sensor and eliminate the resonance phenomenon.