An Improved Power-efficiency Microshutter Array with Thermal Isolation for Lighting Control

Xinyu Ding, Wenlong Jiao, Zishan Xiong, Gai Yang, Xiaoyi Wang, Huikai Xie*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

Electrothermally-actuated microshutters suffer from high power consumption. In this study, an electrothermal microshutter array with Polyimide filled thermal isolation trenches is proposed to improve actuation power efficiency. The microshutter array has an optical aperture of 20×20 mm2 and the power consumption is 9.1

Original languageEnglish
Title of host publication2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024
PublisherIEEE Computer Society
ISBN (Electronic)9798350384925
DOIs
Publication statusPublished - 2024
Event2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 - San Sebastian, Spain
Duration: 28 Jul 20241 Aug 2024

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024
Country/TerritorySpain
CitySan Sebastian
Period28/07/241/08/24

Keywords

  • Electrothermal bimorph actuator
  • Lighting control
  • Microshutter array
  • Power-efficiency

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