An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning

Ankur Jain; Shane Todd; Huikai Xie

An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning

Ankur Jain^*
, Shane Todd
, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Contribution to journal › Conference article › peer-review

14 Citations (Scopus)

Abstract

We report a novel single-crystal-silicon (SCS)-based micromirror that can perform large bi-directional scans and can also generate large piston motion. The micromirror rotates over ±15° at less than 6 V dc voltage, and over ±43° (i.e., >170° optical scan angle) at its resonance of 2.4 kHz. A maximum vertical piston motion of 200 μm is also achieved with this 700 μm-by-320 μm device. A circuit model has been developed for electrothermal behavioral simulation and design optimization. The simulation results using the circuit model match the experimental data to within 8%.

Original language	English
Pages (from-to)	47-50
Number of pages	4
Journal	Technical Digest - International Electron Devices Meeting
Publication status	Published - 2004
Externally published	Yes
Event	IEEE International Electron Devices Meeting, 2004 IEDM - San Francisco, CA, United States Duration: 13 Dec 2004 → 15 Dec 2004

Cite this

@article{e4de8b43817b4e579da8114909558528,

title = "An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning",

abstract = "We report a novel single-crystal-silicon (SCS)-based micromirror that can perform large bi-directional scans and can also generate large piston motion. The micromirror rotates over ±15° at less than 6 V dc voltage, and over ±43° (i.e., >170° optical scan angle) at its resonance of 2.4 kHz. A maximum vertical piston motion of 200 μm is also achieved with this 700 μm-by-320 μm device. A circuit model has been developed for electrothermal behavioral simulation and design optimization. The simulation results using the circuit model match the experimental data to within 8\%.",

author = "Ankur Jain and Shane Todd and Huikai Xie",

year = "2004",

language = "English",

pages = "47--50",

journal = "Technical Digest - International Electron Devices Meeting",

issn = "0163-1918",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "IEEE International Electron Devices Meeting, 2004 IEDM ; Conference date: 13-12-2004 Through 15-12-2004",

}

TY - JOUR

T1 - An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning

AU - Jain, Ankur

AU - Todd, Shane

AU - Xie, Huikai

PY - 2004

Y1 - 2004

N2 - We report a novel single-crystal-silicon (SCS)-based micromirror that can perform large bi-directional scans and can also generate large piston motion. The micromirror rotates over ±15° at less than 6 V dc voltage, and over ±43° (i.e., >170° optical scan angle) at its resonance of 2.4 kHz. A maximum vertical piston motion of 200 μm is also achieved with this 700 μm-by-320 μm device. A circuit model has been developed for electrothermal behavioral simulation and design optimization. The simulation results using the circuit model match the experimental data to within 8%.

AB - We report a novel single-crystal-silicon (SCS)-based micromirror that can perform large bi-directional scans and can also generate large piston motion. The micromirror rotates over ±15° at less than 6 V dc voltage, and over ±43° (i.e., >170° optical scan angle) at its resonance of 2.4 kHz. A maximum vertical piston motion of 200 μm is also achieved with this 700 μm-by-320 μm device. A circuit model has been developed for electrothermal behavioral simulation and design optimization. The simulation results using the circuit model match the experimental data to within 8%.

UR - https://www.scopus.com/pages/publications/21644489119

M3 - Conference article

AN - SCOPUS:21644489119

SN - 0163-1918

SP - 47

EP - 50

JO - Technical Digest - International Electron Devices Meeting

JF - Technical Digest - International Electron Devices Meeting

T2 - IEEE International Electron Devices Meeting, 2004 IEDM

Y2 - 13 December 2004 through 15 December 2004

ER -

An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning

Abstract

Other files and links

Fingerprint

Cite this