Abstract
We report a novel single-crystal-silicon (SCS)-based micromirror that can perform large bi-directional scans and can also generate large piston motion. The micromirror rotates over ±15° at less than 6 V dc voltage, and over ±43° (i.e., >170° optical scan angle) at its resonance of 2.4 kHz. A maximum vertical piston motion of 200 μm is also achieved with this 700 μm-by-320 μm device. A circuit model has been developed for electrothermal behavioral simulation and design optimization. The simulation results using the circuit model match the experimental data to within 8%.
| Original language | English |
|---|---|
| Pages (from-to) | 47-50 |
| Number of pages | 4 |
| Journal | Technical Digest - International Electron Devices Meeting |
| Publication status | Published - 2004 |
| Externally published | Yes |
| Event | IEEE International Electron Devices Meeting, 2004 IEDM - San Francisco, CA, United States Duration: 13 Dec 2004 → 15 Dec 2004 |