An electrothermal Cu/W bimorph tip-tilt-piston MEMS mirror with high reliability

Liang Zhou; Xiaoyang Zhang; Huikai Xie

doi:10.3390/mi10050323

An electrothermal Cu/W bimorph tip-tilt-piston MEMS mirror with high reliability

Liang Zhou
, Xiaoyang Zhang
, Huikai Xie^*

^*Corresponding author for this work

University of Florida

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.

Original language	English
Article number	323
Journal	Micromachines
Volume	10
Issue number	5
DOIs	https://doi.org/10.3390/mi10050323
Publication status	Published - 1 May 2019
Externally published	Yes

Keywords

Cu/W bimorph
Electrothermal actuation
Electrothermal bimorph
MEMS mirror
Reliability

Access to Document

10.3390/mi10050323

Cite this

@article{e3c4cf22854d4c3a9743e0f218434f7a,

title = "An electrothermal Cu/W bimorph tip-tilt-piston MEMS mirror with high reliability",

abstract = "This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.",

keywords = "Cu/W bimorph, Electrothermal actuation, Electrothermal bimorph, MEMS mirror, Reliability",

author = "Liang Zhou and Xiaoyang Zhang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2019 by the authors.",

year = "2019",

month = may,

day = "1",

doi = "10.3390/mi10050323",

language = "English",

volume = "10",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "5",

}

TY - JOUR

T1 - An electrothermal Cu/W bimorph tip-tilt-piston MEMS mirror with high reliability

AU - Zhou, Liang

AU - Zhang, Xiaoyang

AU - Xie, Huikai

PY - 2019/5/1

Y1 - 2019/5/1

N2 - This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.

AB - This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.

KW - Cu/W bimorph

KW - Electrothermal actuation

KW - Electrothermal bimorph

KW - MEMS mirror

KW - Reliability

UR - https://www.scopus.com/pages/publications/85069506506

U2 - 10.3390/mi10050323

DO - 10.3390/mi10050323

M3 - Article

AN - SCOPUS:85069506506

SN - 2072-666X

VL - 10

JO - Micromachines

JF - Micromachines

IS - 5

M1 - 323

ER -

An electrothermal Cu/W bimorph tip-tilt-piston MEMS mirror with high reliability

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this