An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

Hao Chen; Xudong Ma; Yaoyu Deng; Xinyu Ding; Ke Cao; Hui Shang; Wenlong Jiao; Huikai Xie

doi:10.1109/MEMS64181.2026.11419572

An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

Hao Chen
, Xudong Ma
, Yaoyu Deng
, Xinyu Ding
, Ke Cao
, Hui Shang
, Wenlong Jiao
, Huikai Xie^*

^*Corresponding author for this work

Beijing Institute of Technology
Ministry of Education in China

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.

Original language	English
Title of host publication	2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	867-870
Number of pages	4
ISBN (Electronic)	9798331572518
DOIs	https://doi.org/10.1109/MEMS64181.2026.11419572
Publication status	Published - 2026
Externally published	Yes
Event	39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 - Salzburg, Austria Duration: 25 Jan 2026 → 29 Jan 2026

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
Country/Territory	Austria
City	Salzburg
Period	25/01/26 → 29/01/26

Keywords

MEMS mirror
MEMS scanner
focus-tunable
piezoelectric actuator
thin film AIN

Access to Document

10.1109/MEMS64181.2026.11419572

Cite this

Chen, H., Ma, X., Deng, Y., Ding, X., Cao, K., Shang, H., Jiao, W., & Xie, H. (2026). An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. In 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026 (pp. 867-870). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS64181.2026.11419572

Chen, Hao ; Ma, Xudong ; Deng, Yaoyu et al. / An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc., 2026. pp. 867-870 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{6b677986ac9d470588c191bb01942e10,

title = "An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion",

abstract = "In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.",

keywords = "MEMS mirror, MEMS scanner, focus-tunable, piezoelectric actuator, thin film AIN",

author = "Hao Chen and Xudong Ma and Yaoyu Deng and Xinyu Ding and Ke Cao and Hui Shang and Wenlong Jiao and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 ; Conference date: 25-01-2026 Through 29-01-2026",

year = "2026",

doi = "10.1109/MEMS64181.2026.11419572",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "867--870",

booktitle = "2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026",

address = "United States",

}

Chen, H, Ma, X, Deng, Y, Ding, X, Cao, K, Shang, H, Jiao, W & Xie, H 2026, An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. in 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 867-870, 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026, Salzburg, Austria, 25/01/26. https://doi.org/10.1109/MEMS64181.2026.11419572

An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. / Chen, Hao; Ma, Xudong; Deng, Yaoyu et al.
2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc., 2026. p. 867-870 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

AU - Chen, Hao

AU - Ma, Xudong

AU - Deng, Yaoyu

AU - Ding, Xinyu

AU - Cao, Ke

AU - Shang, Hui

AU - Jiao, Wenlong

AU - Xie, Huikai

PY - 2026

Y1 - 2026

N2 - In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.

AB - In this paper, we report the design, fabrication, and characterization of a micromirror capable of four-degree-of-freedom (DOF) motion, i.e., tip, tilt. piston (TTP) and mirror curvature tuning, all generated by piezoelectric actuation. The mirror plate has an optical aperture of 1.0 mm2 and its radius of curvature changes from 10.98 mm-1 to 12.28 mm-1 under a DC bias voltage of ± 50 V. The measured first three resonant modes are located at 1.680 kHz (piston), 2.611 kHz (tip), and 2.660 kHz (tilt), respectively. Under a driving voltage of 40 Vpp, the optical scanning angle and vertical displacement of the mirror plate can reach 13.0° (tilt) at 2.660 kHz and 48 μ m at 1.680 kHz, respectively. This design has promising applications in various compact optical systems.

KW - MEMS mirror

KW - MEMS scanner

KW - focus-tunable

KW - piezoelectric actuator

KW - thin film AIN

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U2 - 10.1109/MEMS64181.2026.11419572

DO - 10.1109/MEMS64181.2026.11419572

M3 - Conference contribution

AN - SCOPUS:105041723273

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 867

EP - 870

BT - 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026

Y2 - 25 January 2026 through 29 January 2026

ER -

Chen H, Ma X, Deng Y, Ding X, Cao K, Shang H et al. An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion. In 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026. Institute of Electrical and Electronics Engineers Inc. 2026. p. 867-870. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS64181.2026.11419572

An ALN-Based Piezoelectric Micromirror with Four-Degree-of-Freedom Motion

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