All-solid integrated optical waveguide Gyro based on chip

MOEMS gyroscope with high sensitivity, all solid-state and integrated manufacturing is a new generation of inertia device in the future development. It is urgent in deep space exploration, manned spacecrsft and guidance technology of spacecraft. In this paper, inertial measurement method and system infrastructure were proposed which were based on the output characteristics of transmission spectra of optical waveguide micro-cavity. And the inertial measurement principle, micro-processing technology as well as the coupling properties were discussed. Design parameters of waveguide coupling system were obtained and optimized by use of numerical fitting. Roughness on the waveguide was reduced by the technology of laser melting and heat treatment. Up to 10⁸ of the quality factor of the micro-cavity was obtained in the test. It lays the foundation for manufacturing of integrated optical waveguide gyro with chip-scale and all-solid.